About: http://webisa.webdatacommons.org/113906366

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, fluorocarbons other than CF4 or C2 F6 may be used and variations of the pressures, gas amounts and RF energy may be used as long as the resultant HF vapor is created within the process chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de