| http://www.w3.org/ns/prov#value | - For a negative image, and for materials deposited from the plasma, typical developers include entities formed by striking a discharge, e.g. a plasma, in halogen containing gases such as molecular chlorine or bromine or HBr. (Such discharges are described in compendia such as Plasma Etching; An Introduction, D. M. Manos and D. L. Flamm, Eds., Academic Press, N.Y., 1989).
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