About: http://webisa.webdatacommons.org/114173300

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	No plasma bias power is applied (i.e., RF power having a sufficiently low frequency to be followed by ions such as copper).
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca