About: http://webisa.webdatacommons.org/114272233

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, in some embodiments, techniques such as masking and photolithography may be used to fabricate a substrate 104.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com