About: http://webisa.webdatacommons.org/114341172

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To combat thisoccurrence, a barrier layer, such as titanium nitride, tantalum, tantalum nitride, or other layers as are known in the art, is applied to the dielectric prior to the copper layer's deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com