About: http://webisa.webdatacommons.org/114615063

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Each form is iso-structural with one of the two common forms of silicon nitride, beta and alpha and with silicon oxynitride.
http://www.w3.org/ns/prov#wasQuotedFrom	wikipedia.org