About: http://webisa.webdatacommons.org/115260981

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such films are useful on substrates such as semiconductor substrates, for example, silicon and gallium arsenide substrates, having sub-micron features and structures.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com