About: http://webisa.webdatacommons.org/115273677

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	During processing, a robot is commonly used to transport a substrate, such as a silicon wafer, from one location to another inside a semiconductor processing machine.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com