About: http://webisa.webdatacommons.org/115276328

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, the present modified embodiment may be also applied to exposure of an opening pattern of a phase shift mask having such structure as shown in FIGS. 3A to 3E.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es