About: http://webisa.webdatacommons.org/115405796

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A sputtering process, such as a physical vapor deposition (PVD) or other techniques known in the art deposits the tantalum.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es