About: http://webisa.webdatacommons.org/115666265

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is an additional object of the invention to provide an excimer laser, such as a KrF or ArF excimer laser having an efficient line-narrowing optical resonator.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr