About: http://webisa.webdatacommons.org/11576080

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	System 100 includes substrate 102, which can be a semiconductor die or other suitable materials on which one or more features have been placed, machined, deposited, or otherwise formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com