About: http://webisa.webdatacommons.org/115862302

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A thin layer 22 of an oxide, such as silicon oxide is on and covers the planar surface 13 of the semiconductor body 12.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr