About: http://webisa.webdatacommons.org/11588149

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Typically, any or all of the chamber lining, distribution manifold 211, susceptor 212, and various other reactor hardware is made out of materials such as aluminum or anodized aluminum.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au