About: http://webisa.webdatacommons.org/115912300

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It should be noted that the inner pressure of the substrate treating system 100 is set higher than that of the clean room so as to prevent foreign matters such as particles from entering the system 100.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com