About: http://webisa.webdatacommons.org/115916696

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It shall be further understood that the description of the invention herein with respect to forming a resist coating can be similarly applied to the dispense of developer and other processing solutions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au