About: http://webisa.webdatacommons.org/115918720

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 2A through 2G show the self-aligned isolation process used to form a memory array such as the array illustrated in FIG. 1 in which sidewall spacers are used to define the source and drain regions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au