About: http://webisa.webdatacommons.org/116074515

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	t, a mixed gas of amolecule including carbon and hydrogen and a molecule including nitrogen, by using the silylated layer 28 as a mask.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com