About: http://webisa.webdatacommons.org/116116100

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	At the oxygen flow rate larger than 100 sccm, particularly larger than 150 sccm, the specific dielectric constant increases remarkably.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca