About: http://webisa.webdatacommons.org/116177511

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It should be noted that the present invention is not limited to producing a diamond coating but can also be used for the deposition of any thin film such as silicon oxide, silicon nitride, gallium nitride, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com