About: http://webisa.webdatacommons.org/116497092

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Subsequently, the gas feed mechanism 251 and the gas discharge mechanism 252 of the load port are operated so that the interior of the clean box is displaced by the non-oxidizing gas such as nitrogen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com