About: http://webisa.webdatacommons.org/116502711

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Suitable materials for the etch stop layer 24 may include, but is not limited to, for example silicon carbide (SiC), silicon nitride, silicon oxynitride (SiON), silicon oxide, or combinations thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com