About: http://webisa.webdatacommons.org/116562751

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This application relates generally to semiconductor devices and device fabrication, including dielectric layers and their method of fabrication.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com