About: http://webisa.webdatacommons.org/116595293

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate 108 may be a silicon wafer, for example, or a glass substrate or other substrates upon which a layer of material may be deposited.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com