About: http://webisa.webdatacommons.org/116680814

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The thickness of the selective growth mask 13 is preferably 0.01 to 5 ??m, more preferably 0.1 to 3 ??m, and especially preferably 0.1 to 2 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr