| http://www.w3.org/ns/prov#value | - sistor, a dielectric film of a storage capacitor, the dielectric film including a first portion provided on the upper wall of the trench and a second portion provided on the lower wall of the trench, the first portion of the dielectric film being thicker than the second portion of the dielectric film, and a capacitor electrode formed on the first and second portions of the dielectric film within t
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