About: http://webisa.webdatacommons.org/116845939

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The source and/or drain junctions, shallow trench isolation (STI) regions, gate stacks, spacers and other structures, are formed on the silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com