About: http://webisa.webdatacommons.org/117039297

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a method for improving bottom coverage and side wall coverage of a high aspect ratio feature of a semiconductor device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com