About: http://webisa.webdatacommons.org/11737464

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the oxide is deposited using an organic substance at low temperature, a porous film having a low density can be formed and an impurity such as carbon may remain.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com