About: http://webisa.webdatacommons.org/117400250

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thin film 26 can be deposited by vacuum vapor deposition, sputtering, electroless plating, chemical vapor deposition, or other suitable methods.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com