About: http://webisa.webdatacommons.org/117517045

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The bottom-most dielectric layer 226 is preferably silicon oxide, but may be any other dielectric such as silicon oxynitride and aluminum oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com