About: http://webisa.webdatacommons.org/117551092

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The overlay mark as recited in claim 1 wherein an image of the test pattern is captured via an imaging tool and an analysis algorithm is used to calculate the relative displacement of the working zones from the captured images.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com