About: http://webisa.webdatacommons.org/117557978

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The insulating film 102 is formed of an insulating material such as silicon oxide, silicon nitride, silicon containing oxygen and nitrogen (oxynitride silicon), or the like, using a CVD method, a sputtering method, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com