About: http://webisa.webdatacommons.org/117630364

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The low pressure/high platen rotational rate polishing process may remove copper-containing materials a rate of about 2500 ???/min or greater, such as between about 3000 ???/min and about 8000 ???/min, for example 4500 ???/min.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com