| http://www.w3.org/ns/prov#value | - When this processing is done with this silicon or other material formed in or on a laminate on a mother substrate, the laminate can be separated as outlined and used as seen in FIGS. 1, 2 and 3. [0153] Depending on the position of the through-holes, after channel formation, additional deposition of solid proton electrolyte may be needed to cover the entire surface with electrolyte material.
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