| http://www.w3.org/ns/prov#value | - The exposure area of the first projection optical system 35a shown in FIG. 1 will be described below with reference to FIGS. 2A, 2B and 2C. FIG. 2A is a plan view showing the relationship between the effective field area and the field in the X-Y plane on the mask 10 in the first projection optical system 35a.
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