| http://www.w3.org/ns/prov#value | - Of these CVD raw materials, Japanese Unexamined Patent Application Disclosure HEI 5-271253 titled High-purity Titanium Complexes and Method for Producing the Same discloses the TiDPM complexes Ti(R1)2 (R2)2 wherein R1 is a ??-diketone such as acetylacetone, 3,5-heptanedione or dipivaloylmethane, and R2 is an alkoxy group such as methoxy, ethoxy, isopropoxy (hereunder, represented as -o-i-Pr),
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