About: http://webisa.webdatacommons.org/118203420

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Where a write beam and a read beam are incident on the substrate side, the protective layer preferably has a thickness of 0.1 to 100 ??m, particularly 1 to 50 ??m, especially 2 to 20 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com