| http://www.w3.org/ns/prov#value | - The cassette stage 114 is so structured as to be capable of operating in such a manner as to: rotate the cassette 110 clockwise by 90 degrees in a vertical direction toward the rear of the housing 111: cause the wafer 200 to maintain a horizontal posture in the cassette 110, and orient the wafer gate of the cassette 110 to the rear of the housing 111.
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