About: http://webisa.webdatacommons.org/118289073

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The plenum 12a itself, however, is not utilized to perform process steps, such as sputtering or etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com