About: http://webisa.webdatacommons.org/118546027

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is applicable to the manufacturing of various types of semiconductor devices, particularly semiconductor devices having a design rule of less than about 0.12 micron.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com