About: http://webisa.webdatacommons.org/118740850

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, the wafer 1 gradually becomes hot from its inside, so as to entirely evaporate the rinsing liquid such as any pure water and IPA remaining in the trenches 1a as depicted in FIG. 2E.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com