About: http://webisa.webdatacommons.org/118816554

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The preferable average film thickness is usually 20 ??m or less, particularly preferably 10 ??m or less.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com