About: http://webisa.webdatacommons.org/118853937

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The vacuum process apparatuses 302A, 302B and 302C are an assembly of apparatuses to be used in successively processing the surfaces of objects to be processed, i.e. semiconductor wafers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com