About: http://webisa.webdatacommons.org/118909464

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method according to claim 1, wherein the silicon-containing gas is SinH2n+2 wherein n is an integer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com