About: http://webisa.webdatacommons.org/118920540

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The process begins with the blanket sputter or LPCVD deposition of a thin conductive barrier layer of a material such as titanium nitride, titanium-tungsten or nitrided titanium-tungsten.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es