About: http://webisa.webdatacommons.org/118928241

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The polysilicon 2 thin film 50 is doped by a conventional method, e.g. ion implantation or POCl3 doping.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com