| http://www.w3.org/ns/prov#value | - Those sites of the vacuum chamber 102 where plasma develops or an arc is produced by plasma generating electromagnetic waves may be covered as required with an insulating member, which may be made of insulating materials including MC nylon, Teflon (PTFE), polyphenylene sulfide (PPS), polyethylene naphthalate (PEN) and polyethylene terephthalate (PET).
|
