About: http://webisa.webdatacommons.org/119033137

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, a conductive material such as aluminum or tungsten is buried in the contact holes by a deposition method such as sputtering and then is patterned to form source/drain electrodes 25.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com