About: http://webisa.webdatacommons.org/11929082

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, there is a need for an improved MFC, wherein the MFC is capable of initiating gas flow by immediately opening a flow control valve to a predetermined position that is known to correspond to a specific gas flow.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com